MEMS technologies have enabled many innovative applications across various disciplines. In this talk, recent developments of MEMS-enabled implantable biomedical micro devices, liquid metal microfluidics and nanophotonics developed at UT Dallas will be presented. Examples of the implantable micro devices include a fully-integrated inductively-coupled battery-less wireless pressure sensor for intraocular pressure sensing application, a fully-integrated inductively-coupled wireless micro neurostimulator forchronic pain management, and a micro cell container for β-cell transplantation for diabetes treatment. For the liquid metal microfluidics, fundamental studies on the microfluidic platforms for liquid metal manipulation and its enormous potential along with wide range of applications will be discussed. Nanophotonics is an emerging field of study which deals with interaction of light with nano scale matters. While there have been many fascinating demonstrations in nanophotonics, adding on-demand tunability to the nanophotonics would greatly expand existing application areas and potentially enable unforeseen new applications. Among many exciting “tunable” nanophotonics, this talk gives a review about recent developments of tunable nano photonic devices using MEMS.